High-resolution and large dynamic range electrometer with adjustable sensitivity based on micro resonator and electrostatic actuator

Jiuxuan Zhao(Zhejiang University), Jin Xie(Beijing Forestry University), Hong Ding(Xian Yang Central Hospital), Lifeng Fu(Zhejiang University), Sheng Ni(Hong Kong University of Science and Technology), Wen Wang(Hangzhou Dianzi University)
Unknown
January 1, 2016
10.1109/memsys.2016.7421820
Cited by 5

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