Effect of reactive sputtered SiOx passivation layer on the stability of InGaZnO thin film transistors

Jun Li(Shanghai University), Zhilin Zhang(Ningbo University), Jianhua Zhang(China University of Petroleum, East China), Wenqing Zhu(Shanghai University), Xue-Yin Jiang(Shanghai University), Fan Zhou(Shanghai University), Hua-Ping Lin(Shanghai University)
Vacuum
April 16, 2012
Cited by 49


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