MEMS power generator with transverse mode thin film PZT

Young-Jun Jeon, R. Sood(PhysioGenix (United States)), Jaehwa Jeong(Korea Institute of Science and Technology), Sung‐Hoon Kim(Massachusetts Institute of Technology)
Sensors and Actuators A Physical
March 1, 2005
10.1016/j.sna.2004.12.032
Cited by 792

Abstract

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