Development of a broadband Mueller matrix ellipsometer as a powerful tool for nanostructure metrology

Shiyuan Liu(University of Waterloo), Chuanwei Zhang(Washington State University), Xiuguo Chen(Huazhong University of Science and Technology)

Thin Solid Films

February 10, 2015

10.1016/j.tsf.2015.02.006

Cited by 144

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