Nanoporous silicon nitride membranes fabricated from porous nanocrystalline silicon templates

Jon‐Paul DesOrmeaux(SiMPore (United States)), James L. McGrath(University of Rochester Medicine), Joshua D. Winans(University of Rochester), Thomas R. Gaborski(Rochester Institute of Technology), Christopher C. Striemer(University of Rochester), Sarah E. Wayson(University of Rochester), Tejas S. Khire(University of Rochester)
Nanoscale
January 1, 2014
Cited by 91


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