Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds

Kweku A. Addae‐Mensah(Vanderbilt University), John P. Wikswo(Vanderbilt University), Nickolay V. Lavrik(Oak Ridge National Laboratory), Scott T. Retterer(Oak Ridge National Laboratory), Susan R. Opalenik(Vanderbilt University), Darrell K. Thomas(Oak Ridge National Laboratory)
Journal of Microelectromechanical Systems
January 4, 2010
Cited by 20


Related Papers