Cryogenic Etching of Silicon: An Alternative Method for Fabrication of Vertical Microcantilever Master Molds
Kweku A. Addae‐Mensah(Vanderbilt University), John P. Wikswo(Vanderbilt University), Nickolay V. Lavrik(Oak Ridge National Laboratory), Scott T. Retterer(Oak Ridge National Laboratory), Susan R. Opalenik(Vanderbilt University), Darrell K. Thomas(Oak Ridge National Laboratory)
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