A digital holographic microscope for complete characterization of microelectromechanical systems
Giuseppe Coppola(Institute of Applied Science and Intelligent Systems), Simonetta Grilli(Institute of Applied Science and Intelligent Systems), Mario Iodice(Institute for Microelectronics and Microsystems), Sergio De Nicola(Istituto di Cibernetica “Eduardo Caianiello”), Pietro Ferraro(TomTom (Netherlands)), Andrea Fińizio(Istituto di Cibernetica “Eduardo Caianiello”)
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