A digital holographic microscope for complete characterization of microelectromechanical systems

Giuseppe Coppola(Istituto di Cibernetica “Eduardo Caianiello”), Simonetta Grilli(Istituto di Cibernetica “Eduardo Caianiello”), Mario Iodice(Institute for Microelectronics and Microsystems), Sergio De Nicola(Istituto di Cibernetica “Eduardo Caianiello”), Pietro Ferraro(National Research Council), Andrea Fińizio(Istituto di Cibernetica “Eduardo Caianiello”)
Measurement Science and Technology
February 9, 2004
Cited by 154


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