Plasma-polymerized hexamethyldisilazane treated by nitrogen plasma immersion ion implantation technique
R. Y. Honda(Universidade Estadual Paulista (Unesp)), Ludovica Ruggiero(Universidade Estadual Paulista (Unesp)), T Nicoleti(Universidade Estadual Paulista (Unesp)), R G S Batocki(Universidade Estadual Paulista (Unesp)), Konstantin Georgiev Kostov(Universidade Estadual Paulista (Unesp)), M. A. Algatti(Universidade Estadual Paulista (Unesp)), Nilson Cristino da Cruz(Universidade de Sorocaba), D.C.R. Santos(Universidade Estadual Paulista (Unesp)), R. Mota(Universidade Federal de Santa Maria), M. E. Kayama(Departamento de Ciência e Tecnologia)
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