Planar integration of E/D-mode AlGaN/GaN HEMTs using fluoride-based plasma treatment
Ruonan Wang(Hong Kong University of Science and Technology), Kevin J. Chen(Hong Kong University of Science and Technology), Yong Cai(Hong Kong University of Science and Technology), Kei May Lau(Hong Kong University of Science and Technology), Chak Wah Tang(Hong Kong University of Science and Technology)
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