Effect of Segmenting Powered Electrode on Plasma Uniformity in Large-Area Capacitively Coupled Plasma Discharge

Zhigang Chen(Applied Materials (United States)), Jozef Kúdela(Technická univerzita vo Zvolene), Tom Tanaka(Applied Materials (United States)), Jason Kenney(Applied Materials (United States)), Ken Collins(Applied Materials (United States)), Ned Hammond(Applied Materials (United States)), Shahid Rauf(Applied Materials (United States))
IEEE Transactions on Plasma Science
June 17, 2011
10.1109/tps.2011.2157118
Cited by 13

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