Thermal Chemical Vapor Deposition of Silicon Carbide Films as Protective Coatings for Microfluidic Structures

Spyros Gallis(University at Albany, State University of New York), Ulrike Futschik(University at Albany, State University of New York), James Castracane(University at Albany, State University of New York), Alain E. Kaloyeros(University at Albany, State University of New York), Harry Efstathiadis(University at Albany, State University of New York), Walter Sherwood(Starfire Systems (United States)), Susan E. Hayes(Starfire Systems (United States)), Costas G. Fountzoulas(DEVCOM Army Research Laboratory)
MRS Proceedings
January 1, 2002
Cited by 4

Abstract


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