Modeling of Cu-CMP and Its Application for Hotspot Prediction

Jingxun Fang(Shanghai Huali Microelectronics (China)), Jun Zhu(Shanghai Huali Microelectronics (China)), Sheng Ni(Hong Kong University of Science and Technology), Yun Cao(Shanghai Huali Microelectronics (China)), Zhengfang Liu(East China Jiaotong University), Quan Chen(Shanghai Huali Microelectronics (China)), Yefang Zhu(Third People's Hospital of Huzhou), Fang Wei(Shanghai Huali Microelectronics (China)), Lei Tong, Zhibiao Mao(Shanghai Huali Microelectronics (China)), Shirui Yu(Shanghai Huali Microelectronics (China)), Huan Kan(Shanghai Huali Microelectronics (China))
ECS Journal of Solid State Science and Technology
January 1, 2014
10.1149/2.014405jss
Cited by 9

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