A MEMS digital mirror for tunable laser wavelength selection

Wei Zhu(Northwestern Polytechnical University), A. Q. Liu(Hong Kong Polytechnic University), Tarik Bourouina(ESI Group (France)), J. Tamil(Nanyang Technological University), B. Liu(National University of Singapore), W. Zhang(Nanyang Technological University), Hong Cai(Institute of Microelectronics)
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
June 1, 2009
10.1109/sensor.2009.5285615
Cited by 6

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