PECVD low-permittivity organosilicate glass coatings: Adhesion, fracture and mechanical properties
Youbo Lin(Harvard University), Joost J. Vlassak(Harvard University), Ting Y. Tsui(Advanced Micro Devices (United States)), Yong Xiang(University of Electronic Science and Technology of China)
Cited by 59
Related Papers
Highly stretchable and tough hydrogels
|Nature|2012|5.4k
Tough adhesives for diverse wet surfaces
|Science|2017|1.6k
Instrumented cardiac microphysiological devices via multimaterial three-dimensional printing
|Nature Materials|2016|853
Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments
|Journal of materials research/Pratt's guide to venture capital sources|1998|820
A new bulge test technique for the determination of Young's modulus and Poisson's ratio of thin films
|Journal of materials research/Pratt's guide to venture capital sources|1992|699