The LIGA technique and its potential for microsystems-a survey

Abstract

The LIGA technique, which is being developed at the Research Center Karlsruhe, offers the possibility to manufacture microstructures with arbitrary lateral geometry, lateral dimensions down to below 1 /spl mu/m and aspect ratios up to 500 from a variety of materials (metals, plastics, and ceramics). The basic steps of X-ray lithography, electroplating, and plastic molding, are briefly described. Examples of applications of the LIGA technique are: optical components (high performance microspectrometer), mechanical components (acceleration sensor with integrated temperature compensation), and fluidic components (micropumps) which are presented and discussed. Microcomponents will be of limited interest in the future if it will not be possible to integrate them into microsystems. Microsystems must be more powerful than the sum total of their components. This is discussed in the final chapter of this article.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>