On the use of shape memory alloy thin films to tune the dynamic response of micro-cantilevers

T Kniknie(Eindhoven University of Technology), Joost J. Vlassak(Harvard University), Erik Homburg(Eindhoven University of Technology), Yves Bellouard(Rensselaer Polytechnic Institute), Henk Nijmeijer(Eindhoven University of Technology), X. Wang(Harvard University)
Journal of Micromechanics and Microengineering
December 15, 2009
Cited by 14


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