MOCVD Of Gallium Oxide Thin Films Using Homoleptic Gallium Complexes: Precursor Evaluation and Thin Film Characterisation

Malte Hellwig(Ruhr University Bochum), Anjana Devi(Leibniz Institute for Solid State and Materials Research), Detlef Rogalla(University Hospitals of the Ruhr-University of Bochum), Roland A. Fischer(Technical University of Munich), Davide Barreca(National Interuniversity Consortium of Materials Science and Technology), Alberto Gasparotto(University of Padua), J. Winter(Ruhr University Bochum), Benedikt Niermann(Ruhr University Bochum), Ke Xu(Hubei University of Arts and Science)
ECS Transactions
September 25, 2009
Cited by 9


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