Mechanical properties of aluminum, zirconium, hafnium and tantalum oxides and their nanolaminates grown by atomic layer deposition

Taivo Jõgiaas(University of Tartu), Markku Leskelä(University of Helsinki), Aile Tamm(University of Tartu), Kaupo Kukli(University of Tartu), R. Zabels(University of Latvia), Hugo Mändar(University of Tartu), Irina Hussainova(Tallinn University of Technology), Mikko Ritala(University of Helsinki), Mikko Heikkilä(University of Helsinki), Maido Merisalu(University of Tartu)
Surface and Coatings Technology
November 1, 2015
Cited by 38


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