CMOS-compatible ruggedized high-temperature Lamb wave pressure sensor

Piotr Kropelnicki(Agency for Science, Technology and Research), H. Vogt(Fraunhofer-Gesellschaft), Julius M. Tsai(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), A. B. Randles(Agency for Science, Technology and Research), Wan Chia Ang(Agency for Science, Technology and Research), Xiaopan Mu(Agency for Science, Technology and Research)
Journal of Micromechanics and Microengineering
July 12, 2013
Cited by 29


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