Properties of carbonization layers relevant to plasma-surface-interactions

J. Winter(Ruhr University Bochum), B. Emmoth(Forschungszentrum Jülich), V. Philipps(Forschungszentrum Jülich), K. Besocke(Forschungszentrum Jülich), P. Wienhold(Forschungszentrum Jülich), H.G. Esser, W. Möller(Helmholtz-Zentrum Dresden-Rossendorf), E. Vietzke
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
May 1, 1987
Cited by 45


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