Indium tin oxide template development for step and flash imprint lithography

Kathleen A. Gehoski(Motorola (United States)), Harald F. Hess(Howard Hughes Medical Institute), William J. Dauksher(Motorola (United States)), M. L. A. Raphaelian, M. A. McCord(KLA (United States)), Eric S. Ainley(Motorola (United States)), Kevin J. Nordquist(Motorola (United States)), Douglas J. Resnick(The Ohio State University)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
May 6, 2005
Cited by 1


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