Fabrication of High-Performance Ultrathin In<sub>2</sub>O<sub>3</sub> Film Field-Effect Transistors and Biosensors Using Chemical Lift-Off Lithography
Jaemyung Kim(Northwestern University), Paul S. Weiss(University of California, Los Angeles), You Seung Rim(California NanoSystems Institute), Hannah L. Hinton(California NanoSystems Institute), Chuanzhen Zhao(Stanford University), Anne M. Andrews(California NanoSystems Institute), Huajun Chen(California NanoSystems Institute), Huan H. Cao(California NanoSystems Institute), Yang Yang(California NanoSystems Institute), Nako Nakatsuka(California NanoSystems Institute)
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