Self-assembled tungsten nanocrystals in high-k dielectric for nonvolatile memory application

Subhranu Samanta(National University of Singapore), N. Balasubramanian(Singapore Science Park), Zerlinda Tan(National University of Singapore), Sungjoo Lee(Tohoku University), Ganesh Samudra(National University of Singapore), Won Jong Yoo(Institute of Nanotechnology), L. K. Bera(Singapore Science Park)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
October 26, 2005
10.1116/1.2083930
Cited by 14

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