Efficient gettering of low concentrations of copper contamination to hydrogen induced nanocavities in silicon

A. Kinomura(Australian National University), Y. Hayashi(Australian National University), J. Wong‐Leung(Australian National University), J. S. Williams(University of Illinois Urbana-Champaign), M. Petravić(Australian National University), Yoshiro Nakano(Australian National University)
Applied Physics Letters
November 2, 1998
Cited by 14


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