Cleaning and conditioning of the walls of plasma devices by glow discharges in hydrogen

F. Waelbroeck, P. Wienhold(Forschungszentrum Jülich), J. Winter(Ruhr University Bochum)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
October 1, 1984
10.1116/1.572465
Cited by 49

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