X-ray and electron-beam lithography of three-dimensional array structures for photonics

Filippo Romanato(Istituto Nazionale di Fisica Nucleare, Galileo Galilei Institute for Theoretical Physics), Daniele Bajoni(University of Pavia), Dan Cojoc(AREA Science Park), Enzo Di Fabrizio(Politecnico di Torino), Mattéo Galli(University of Pavia)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
November 1, 2003
Cited by 13


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