Surface morphology and dynamic scaling in growth of iron nitride thin films deposited by dc magnetron sputtering

Xin Wang(Jiangxi University of Traditional Chinese Medicine), Jianan Han(Hospital for Sick Children), Lijun Gao(Shanghai University of Engineering Science), W. D. Fei(Harbin Institute of Technology), Lianghuan Wei(Jilin University), Xiaodong He(Harbin Institute of Technology), Sheng Meng(Chinese Academy of Sciences), Wenhui Guo(Nanjing University of Science and Technology), Weitao Zheng(South China Normal University), Yongkang Bai(China XD Group (China))
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
June 3, 2003
10.1116/1.1582452
Cited by 10

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