Structure, Optical Property and Thermal Stability of Copper Nitride Films Prepared by Reactive Radio Frequency Magnetron Sputtering

Jianrong Xiao(Guilin University of Technology), Aihua Jiang(Guilin University of Technology), Yanwei Li(Guilin University of Technology)

Journal of Material Science and Technology

January 1, 2011

10.1016/s1005-0302(11)60082-0

Cited by 57

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