Influence of hot wire on the formation of microcrystalline silicon in MWECR–CVD system

Zhu Xiu-Hong(Beijing University of Technology), Zhizhong Li(Beijing University of Technology), Bin He(University of Jinan), Yi Ding(Nankai University), Guanghua Chen(Beijing University of Technology), Ma Zhan-Jie(Beijing University of Technology), Gao Zhi-Hua(Beijing University of Technology), Wenli Zhang(Beijing University of Technology)
Vacuum
September 27, 2005
Cited by 2


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