Design and Fabrication of S<sub>0</sub> Lamb-Wave Thin-Film Lithium Niobate Micromechanical Resonators

Renyuan Wang(Ningbo University), Kushal Bhattacharjee(Advanced Micro Devices (United States)), Sunil A. Bhave(Purdue University West Lafayette)
Journal of Microelectromechanical Systems
January 9, 2015
Cited by 75


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