A Study on the Metal Organic CVD of Pure Copper Films from Low Cost Copper(<scp>II</scp>) Dialkylamino‐2‐propoxides: Tuning the Thermal Properties of the Precursor by Small Variations of the Ligand

R. Becker(Ruhr University Bochum), Roland A. Fischer(Technical University of Munich), Christoph Kiener(Max Planck Society), Anjana Devi(Leibniz Institute for Solid State and Materials Research), M. Winter(Max Planck Society), U. Weckenmann(Ruhr University Bochum), Harry Becker(Ruhr University Bochum)
Chemical Vapor Deposition
June 16, 2003
Cited by 64


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