Excited state density distributions of H, C, C2, and CH by spatially resolved optical emission in a diamond depositing dc-arcjet reactor

Jorge Luque(Lam Research (United States)), Jay B. Jeffries(SRI International), Elizabeth A. Brinkman(SRI International), W. Juchmann(SRI International)
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
March 1, 1998
Cited by 66


Related Papers