Ion mass effect on vacancy-related deep levels in Si induced by ion implantation

E. V. Monakhov(University of Oslo), B. G. Svensson(KTH Royal Institute of Technology), Andrej Kuznetsov(University of Oslo), J. Wong‐Leung(Australian National University), C. Jagadish(Australian National University)
Physical review. B, Condensed matter
May 28, 2002
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