Description of HiPIMS plasma regimes in terms of composition, spoke formation and deposition rate

Teresa de los Arcos(Ruhr University Bochum), J. Winter(Ruhr University Bochum), Yolanda Aranda Gonzalvo(Hiden Analytical (United Kingdom)), Volker Schulz-von der Gathen(Ruhr University Bochum), R. Schröder(Ruhr University Bochum)
Plasma Sources Science and Technology
September 25, 2014
Cited by 27


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