Effect of laser irradiation on the structures properties such as SiO 2 /Si

Vadim P. Veiko(ITMO University), E. I. Efimov(ITMO University), Quang Tung Pham(ITMO University), R. A. Khalecki(ITMO University), В. И. Соколов(Volodymyr Dahl East Ukrainian National University), A.M. Skvortsov(Saint - Petersburg State Chemical Pharmaceutical Academy)
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
July 22, 2010
10.1117/12.889523
Cited by 6

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