Accurate characterization of a thick multilayer structure using the marking-layer-based scanning electron microscopy method

Qiushi Huang(Tongji University), Hong Chen(Tongji Hospital), Haochuan Li(Tongji University), Jingtao Zhu(Fujian Medical University), Zhanshan Wang(Tongji University)
Journal of Physics D Applied Physics
June 19, 2013
Cited by 5


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