Transient enhanced diffusion and deactivation of ion-implanted As in strained Si

Gabriela Dilliway(University of Surrey), N. E. B. Cowern(University of Surrey), P.J. McNally(Dublin City University), Lu Xu(Shanghai Institute of Optics and Fine Mechanics), J. D. Benson(US Night Vision (United States)), H. Kheyrandish, G. A. Cooke, Andrew J. Smith(Intel (United States)), J. J. Hamilton(University of Surrey)
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms
July 28, 2005
Cited by 7


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