A model for longitudinal piezoelectric coefficient measurement of the aluminum nitride thin films

Xiaomeng Bi(Chinese Academy of Sciences), Lianqun Zhou(Suzhou Institute of Biomedical Engineering and Technology), Junfeng Wu(Chinese Academy of Sciences), Haiwen Li(Sun Yat-sen University), Yihui Wu(Chinese Academy of Sciences)
Journal of Materials Science Materials in Electronics
April 2, 2014
Cited by 20


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