Tribological properties and characterization of DLC films deposited by pulsed bias CVD

Tsuguyori Ohana(National Institute of Advanced Industrial Science and Technology), Yasutoshi Koga(Kurume University), Masahiro Suzuki(Fujita Health University), Akihiro Tanaka(Shujitsu University), Takako Nakamura(National Institute of Advanced Industrial Science and Technology)
Diamond and Related Materials
January 2, 2004
10.1016/j.diamond.2003.11.019
Cited by 96

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