29.3: <i>Invited Paper</i> : The Mechanical Reliability of Flexible ALD Barrier Films

Anuradha Bulusu(Georgia Institute of Technology), Samuel Graham(Georgia Institute of Technology), Christian Hopmann(RWTH Aachen University), David Samet(Georgia Institute of Technology), Olivier Pierron(Georgia Institute of Technology), Eva K. Baumert(Georgia Institute of Technology), Farzad Sadeghi‐Tohidi(Georgia Institute of Technology), Henrik Behm(RWTH Aachen University), J. Winter(Ruhr University Bochum), Hendrick Bahre(Ruhr University Bochum)
SID Symposium Digest of Technical Papers
June 1, 2013
Cited by 8


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