Atomic Layer Deposition of Gd-Doped HfO[sub 2] Thin Films

Christoph Adelmann(IMEC), Sven Van Elshocht(Columbia University), Xiaodong Shi(Beijing Anding Hospital), Hilde Tielens(IMEC), Dieter Pierreux(ASM International (Belgium)), Marlies K. Van Bael(IMEC), Daan Dewulf(IMEC), An Hardy(IMEC), J. A. Kittl(IMEC), Erik Rosseel(IMEC), Johan Swerts(IMEC)
Journal of The Electrochemical Society
January 1, 2010
Cited by 53


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