Atomic Layer Deposition of Gd-Doped HfO[sub 2] Thin Films
Christoph Adelmann(IMEC), Sven Van Elshocht(Columbia University), Xiaodong Shi(Beijing Anding Hospital), Hilde Tielens(IMEC), Dieter Pierreux(ASM International (Belgium)), Marlies K. Van Bael(IMEC), Daan Dewulf(IMEC), An Hardy(IMEC), J. A. Kittl(IMEC), Erik Rosseel(IMEC), Johan Swerts(IMEC)
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