Chemical Structural Analysis of Diamondlike Carbon Films with Different Electrical Resistivities by X-ray Photoelectron Spectroscopy

Susumu Takabayashi(Hiroshima University), Takayuki Takahagi(Hiroshima University), Hitoshi Suzuki(Nagoya University), K. Shimada(Hiroshima University), Kunihiko Motomitsu(Hiroshima University), Keishi Okamoto(Hiroshima University), Hiroaki Motoyama(Hiroshima University), Tatsuyuki Nakatani(Okayama University of Science), Hiroyuki Sakaue(Hiroshima University)
Japanese Journal of Applied Physics
May 1, 2008
Cited by 43


Related Papers