Accurate characterization of SiO<sub>2</sub> thin films using surface acoustic waves
Matthias Knapp(University of Freiburg), Leonhard Reindl(University of Freiburg), Ingo Bleyl, Matthias Honal, Andreas Mayer(University College London), Philipp Jager, Alexey M. Lomonosov(Prokhorov General Physics Institute), Paul A. Warkentin, W. Ruile(Siemens (Germany)), Hans-Peter Kirschner
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
April 1, 2015
Cited by 12
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