Self-assembly from milli- to nanoscales: methods and applications

Massimo Mastrangeli(IMEC), K. F. Böhringer(University of Washington), Chris Van Hoof(IMEC), Shaghayegh Abbasi(University of Washington), Cagdac Varel(University of Washington), J.-P. Celis(IMEC)
Journal of Micromechanics and Microengineering
July 8, 2009
Cited by 251


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