Chemical vapour deposition of silanes

Ulf Jönsson(Swedish Defence Research Agency), G. Olofsson(Swedish Defence Research Agency), Magnus Malmqvist(Swedish Defence Research Agency), Inger Rönnberg(Swedish Defence Research Agency)
Thin Solid Films
February 1, 1985
10.1016/0040-6090(85)90253-6
Cited by 82

Abstract

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