Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics

I. V. Schweigert(Russian Academy of Sciences), J. Winter(Ruhr University Bochum), A. L. Alexandrov(Institute of Theoretical and Applied Mechanics), Eva Kovačević(Université d'Orléans), Ilija Stefanović(Ruhr University Bochum), F. M. Peeters(University of Antwerp), Johannes Berndt(Université d'Orléans), D. A. Ariskin(University of Antwerp)
Physical Review E
August 19, 2008
Cited by 39


Related Papers