Synthesis and characterization of fluorinated amorphous carbon films by reactive magnetron sputtering
Masatou Ishihara(National Institute of Advanced Industrial Science and Technology), Yasutoshi Koga(Kurume University), Masahiro Suzuki(Fujita Health University), T. Watanabe(Nagoya University), Takako Nakamura(National Institute of Advanced Industrial Science and Technology), Akihiro Tanaka(National Institute of Advanced Industrial Science and Technology)
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