Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications
Chong Pei Ho(Agency for Science, Technology and Research), Chengkuo Lee(National University of Singapore), Prakash Pitchappa(National University of Singapore), Piotr Kropelnicki(Agency for Science, Technology and Research), Hong Cai(Institute of Microelectronics), Jian Wang(Agency for Science, Technology and Research), Yuandong Gu(Agency for Science, Technology and Research)
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