Mechanical properties of titanium oxide film deposited on LTI-carbon by IBED
Xianghui Wang(East China Normal University), Shiqi Yang(Chinese Academy of Sciences), Xianghuai Liu(Chinese Academy of Sciences), Liujiang Yu(Shanghai Institute of Microsystem and Information Technology), Zhihong Zheng(Shanghai Institute of Microsystem and Information Technology), Changrong Li(East China Normal University), Feng Zhang(Sinopec (China)), Xi Wang(Dalian University of Technology)
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