Effect of depositing parameters on microstructures and properties of multi arc ion plating ZrTiN films

Pei Yan(Shandong University), Xing Ai(Shandong University), Jianxin Deng(Shandong University), Z. Chen(Shandong University), Jun Zhao(Suzhou University of Technology), Y S Lian(Shandong University)
Surface Engineering
February 1, 2012
10.1179/1743294411y.0000000029
Cited by 18

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